MULTIPACTOR CHARGED PARTICLE SOURCE

摘要

PURPOSE:To make possible to effectively take out ion or electron particles without increase in the dimension of a charged particle source by forming irregularities on the surface of a secondary electron emission electrode. CONSTITUTION:A large number of irregularities 47 are formed on the surface of a secondary electron emission electrode 41 to increase its surface area. Each of irregularities 47 is formed in a pyramidal form having an angle theta of 45 deg. or more and a height H of 1/10 or less of a distance between a mesh electrode 42 and the secondary electron emission electrode 41. An angle theta of 45 deg. or more corresponds to 2 of a surface roughness factor. In operation, high frequency voltage 44 is applied between the secondary electron emission electrode 41 and the mesh electrodes 42. Argon gas is supplied between both electrodes 41 and 42, and voltage of plus 200V is applied to the secondary electron emission electrode 41 from a DC power source 45 to perform a single electrode discharge.