| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for assembling a micro-actuator suitable for mass production. SOLUTION: This method is such method for assembling a micro-actuator that a base frame having a plurality of actuator bases is placed and held on a stage, a first adhesive is applied on respective actuator bases, and a base-electrode frame with a plurality of base electrodes is placed and held on the first adhesive. The first adhesive is half hardened by the heating and the pressing. A second adhesive is applied on respective base electrodes, and a plurality of piezoelectric devices are placed and held on the second adhesive. The second adhesive is half hardened by the heating and the pressing. A third adhesive is applied on the piezoelectric devices, and a movable electrode frame with a plurality of the movable electrodes is placed and held on the third adhesive. The third adhesive is half hardened by the heating and the pressing. A fourth adhesive is then applied on respective movable electrodes, and a hinge-plate frame with a plurality of hinge plates is placed and held on the fourth adhesive. The fourth adhesive is half hardened by the heating and the pressing. Finally, the adhesion layered product obtained in this way is put into a heating furnace to be heated during predetermined time at predetermined temperature, so that respective adhesives are completely hardened. |
