| 摘要 |
<p>PURPOSE:To detect the defect of the shapes of circuit patterns existing common with each circuit pattern by inspecting another one pattern regarding a section corresponding to the positional coordinates of a defect detected from one pattern. CONSTITUTION:The whole region of a pattern corresponding to one circuit is inspected regarding said pattern. Inspection is conducted by comparing picture detecting signals from a pattern detector 3 and design data memorized to a design data storing memory 5. The position of detection of the pattern is measured by coordinate measuring instruments 7, 8 at that time. A discording section between the picture detecting signals and the design data is discriminated as a defect, and the position of coordinates of the discording section is memorized. A pattern corresponding to another one circuit is inspected, but only the position of coordinates corresponding to the defect section in the previously inspected pattern is inspected. When a section having said position of coordinates is also detected as a defect at that time, the section is regarded as a defect common with the whole circuits.</p> |
