发明名称 LIGHTING DEVICE FOR SLIT EXPOSURE
摘要 PURPOSE:To uniform the illuminance at a part to be illuminated by irradiating the objective part with direct light from a tubular light source and with reflected light from a columnar main reflecting mirror, upper reflecting mirror, lower reflecting mirror, and rear reflecting mirror, and adding reflected light from a corrugated auxiliary reflecting mirror. CONSTITUTION:The part 24 to be irradiated is irradiated lightly from the tubular light source 21 having light emission parts 21' dispered in series and also irradiated with reflected light from the upper reflecting mirror 22a, lower reflecting mirror 22b, and rear reflecting mirror 22c. Further, the corrugated reflecting mirror 23 related to the positions of the light emitting parts 21' is provided as the auxiliary reflecting mirror. Consequently, reflected light beams from the respective reflecting mirrors are put together to uniform the illuminance at the irradiated part 24.
申请公布号 JPS60254125(A) 申请公布日期 1985.12.14
申请号 JP19840111155 申请日期 1984.05.31
申请人 MATSUSHITA DENKI SANGYO KK 发明人 YAMADA OSAMU
分类号 G03B27/54;G03G15/04 主分类号 G03B27/54
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