Vertical bidirectional stacked power fet.

摘要

A vertical bidirectional multi-channel stacked power FET (40) has a plurality of alternating conductivity type layers extending laterally horizontally and stack vertically between top and bottom major surfaces (44, 46). The stack (48) includes a plurality of channel-containing regions (49-54) interleaved with a plurality of source regions (55-61). A notch (70) extends downwardly through the lowermost channel-containing region of the stack and includes an insulated gate electrode (68) for inverting the conductivity type of the channel-containing regions to induce conduction channels (49a-54a) between the source regions and enable bidirectional field effect current conduction between the top and bottom surfaces. OFF state voltage is dropped in each direction serially across the junctions between the layers such that depletion region spreading from a plurality of junctions must be vertically coupled before OFF state breakdown.