| 摘要 |
PURPOSE:To improve the transferring accuracy by modulating a light emitted to a mark for detecting a distortion, thereby compensating the distortion of the sample by detecting in a real time. CONSTITUTION:An X-ray output becomes maximum at transferring time when the deformed amount of a sample 5 is zero, and an output from a synchronizing rectifier 31 exhibits a triangular shape with zero of deformed amount as zero with respect to the deformed amount of the sample during transferring. The deformed amount of the sample 5 is accurately measured from the output. An AC firing of a light source 7 used at this time does not affect the influence to a transferring pattern. The current of a focusing coil 8 is controlled by a controller 33 and a coil power source 19 in response to the measured deformed amount, the magnification of the transfer is regulated to correct it. As a result, the correction of the sample 5 due to thermal deformation generated during transferring can be performed in a real time. |
