发明名称 METHOD FOR HEAT TREATMENT
摘要 PURPOSE:To uniformly perform a heat treatment on each material to be heat- treated by a method wherein the inside of a furnace is preheated before the material to be heat-treated is brought in it, and the carrying-in of the material to be heat-treated is performed in the prescribed temperature range. CONSTITUTION:Pertaining to the heat treatment device wherein the material to be heat-treated 11 is brought in a heating furnace 14 and said material 11 is heated up by a light source 15, the heating furnace 14 is preheated before the material to be heat-treated 11 is brought in the heating furnace 14. When the temperature in the furnace is raised to the prescribed temperature range, the carrying-in of the material to be heat-treated is started. A heat treatment is started based on the output program with which the input of the light source 15 is ontrolled when the furnance is heated up to the starting temperature of annealing or when the temperature is a little lower than the above. As a result, the non-uniformity of a heat treatment, which is performed when the material to be heat-treated is heat-treated continuously one by one or when the heat treatment is started again after it is once stopped, can be prevented.
申请公布号 JPS60247936(A) 申请公布日期 1985.12.07
申请号 JP19840105571 申请日期 1984.05.23
申请人 DAINIHON SCREEN SEIZOU KK 发明人 TERAOKA HIDEYUKI;TAKEUCHI TSUTOMU;TERAUCHI KENICHI;NISHIZAWA HISAO;ITOU MASAKUNI;NISHII KIYOBUMI;YASUE ATSUSHI;TAKAHASHI MITSUKAZU;WADA YASUYUKI
分类号 H01L21/26;H01L21/324 主分类号 H01L21/26
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