发明名称 WIRING TEST PATTERN
摘要 <p>PURPOSE:To alter the interval of wirings to be tested irrespective of the thickness and the pitch of the wirings by varying the size or pitch of repetitive base unit for upper wiring and lower structure and adding folding lines of 45 deg. to parallel straight lines. CONSTITUTION:If the sizes are different between a base unit 61 of the primary layer and the base unit 62 of upper wirings, the units are repetitively superposed to increase the number of the cases of taking the upper wirings with respect to the primary layer. A straight line of 45 deg. is used in addition to parallel straight lines to alter the interval between the lines 71, 72 and a folding line 73. Further, the first and second wirings 81, 82 are formed with one base unit for three cases of parallel, 45 deg. and perpendicular.</p>
申请公布号 JPS60245147(A) 申请公布日期 1985.12.04
申请号 JP19840101000 申请日期 1984.05.18
申请人 MATSUSHITA DENKI SANGYO KK 发明人 KUDOU HITOSHI
分类号 H01L21/3205;H01L21/66;H01L23/52;H01L23/544 主分类号 H01L21/3205
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