| 摘要 |
PURPOSE:To adjust the resistance of a voltage divider while adjusting a strain gauge by forming the strain gauge on a strain inducer in a thin-film process and forming plural resistances for the voltage divider on one surface of the strain inducer in a thin-film process. CONSTITUTION:A load cell member 2 is formed of the strain inducer 5 with four thin deforming parts 8 which deform in a parallelogram shape and an electronic circuit board 6 as its flank. Resistances R1-R4 of the differential amplifier 14, resistances R5-R8, RB, RS, and RT of a load cell part 13, resistances R13-R15 of a voltage divider 12, resistances R9 and R10 of a zero-point setter 15, and resistances R11 and R12 of a signal amplifier 16 are formed on the top pattern formation surface 9 of the strain inducer 5 by thin-film technique. Then, the resistances R5-R8 are positioned at the deforming parts to form the strain gauge, and while the value of the resistance RB is adjusted by a laser trimmer for the balance with the strain gauge, the resistance 14 is adjusted to set the input voltage V'E of the amplifier 14. |
