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发明名称
摘要
申请公布号	JPS60178575(U)	申请公布日期	1985.11.27
申请号	JP19840066263U	申请日期	1984.05.07
申请人		发明人
分类号	B25B9/02;H01L21/02;H01L21/677;(IPC1-7):B25B9/02	主分类号	B25B9/02
代理机构		代理人
主权项
地址

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