METHOD OF FORMING PHOSPHOSILICATE GLASS FILMS,申请号EP19810303829-传众专利搜索

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发明名称	METHOD OF FORMING PHOSPHOSILICATE GLASS FILMS
摘要
申请公布号	EP0047112(B1)	申请公布日期	1985.11.27
申请号	EP19810303829	申请日期	1981.08.21
申请人	FUJITSU LIMITED	发明人	MIYAMOTO, HIDEKAZU;MAEDA, MAMORU;SHIOYA, YOSHIMI;TAKAGI, MIKIO
分类号	C23C16/44;C23C16/455;H01L21/316;(IPC1-7):H01L21/316;H01L21/68	主分类号	C23C16/44
代理机构		代理人
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