| 摘要 |
PURPOSE:To enable determination of an error at the measurement termination point, by installing 3 detectors in the travelling direction of a detector supporting table travelling along a guide surface in equal distances, and determining straightness of guide surface, straightness and longitudinal vibration of a specimen from the measurements obtained from the specified equations. CONSTITUTION:Straightness errors of guide surface 2 and specimen 1 at the starting point of measurement are represented as X0, Y0, those at the position No.1 as X1, Y1, X2, Y2 at the position No.2 and measurements of individual displacement detectors A, B and C at the starting point of measurement are represented as DOA, DOB and DOC. Further, measurements at the point No.K obtained by travels per each distance l of the detecting table 3 are represented as DKA, DKB and DKC and those at the point No.K+i as DK+iA, DK+iB and DK+iC and the straightness XK+2 of the guide surface 2 at the point No.K+2 are calculated by the equation I. Further, the straightness YK+2 of the specimen 1 is calculated by the equation II and forward and backward longitudinal vibrations thetaK+1 by the equation III respectively. |
