摘要 |
PURPOSE:To obtain an image of a sample surface expanded with high magnification by a method, in which a sample is made into a plane body while facing said plane body, one or plural anodes having ion passage holes are disposed and the anodes with the phosphor films arranged so as to overlap said anodes at a fixed distance are also disposed. CONSTITUTION:When a direct current supply is impressed on the electrodes 1, 2 and 3, the directions of the electric lines of force are those shown by the dotted lines. Accordingly, when a sample such as sodium or other metal materials is attached onto a plane electrode 1, its atoms are ionized and flying out vertically to every part of the face of the electrode 2 in the shape of a circular arc. Some of ion particles are made to pass through a minute hole 4 in the center part of the anode 2 while said ion particles being further accelerated by the voltage impressed between the anode 2 and the anode 3 so that said ion particles may expand in the directions of electric lines of force for vertically colliding with each part of the face of the anode 3 in the shape of the circular arc. Thereby, the ion particles having passed through the minute hole 4 further project an expanded image of a part of the sample surface. |