| 摘要 |
PURPOSE:To eliminate the coating of an absorbing member by providing a low resistance part in a thick part of a piezoelectric thin film in a region through which a surface acoustic wave is propagated and utilizing the low resistance part as an absorbing body of an unnecessary surface acoustic wave. CONSTITUTION:A piezoelectric thin film 2 is made of zinc oxide and an ultraviolet ray is irradiated on regions 10, 11 so as to form a part whose resistance is decreased. The unnecessary surface acoustic waves 6, 7 are attenuated through the parts 10, 11 and no effect is given to the element characteristic. Input/output transducers 3, 4 are provided to the surface of the zinc oxide piezoelectric thin film 2 in an example of this execution and when they are provided at a boundary surface with the substrate 1, the action and effect of this invention are unchanged. |
