Apparatus for quantitative secondary ion mass spectrometry.

摘要

An apparatus for quantitative secondary ion mass spectrometry comprising a sealed chamber (11) for storing a sample (S) containing a light impurity element which is to be analyzed, secondary ion generating means for bombarding a primary ion beam (PIB) onto the sample (S) so as to allow the sample (S) to emit a secondary ion (SI) of the light element, and quantitative analyzing means (32) for detecting the secondary ion (SI) so as to quantitatively analyze the light element contained in the sample (S). First evacuating means evacuates said sealed chamber (11) to an ultrahigh vacuum during quantitative analysis. First cryopanel means (19) is arranged to surround the sample, and first cooling means (14) keeps said first cryopanel means (19) at a cryogenic temperature during quantitative analysis so that said first cryopanel means (19) adsorbs a gas present in said sealed chamber (11).