| 摘要 |
PURPOSE:To reduce the size of the angle sensor and to improve its sensitivity by deflecting a light beam passed through a pinhole perpendicularly by a reflection mirror through a half-mirror and making it incident on the surface of mercury liquid, and providing a semiconductor position detecting element on the image forming surface of an image forming lens which converges its reflected luminous flux. CONSTITUTION:Parallel light from a light source 1 and condenser lens 2 is made incident on the (x)-axial reflecting surface 6 of a prism 5 through the half-mirror 4, its reflected light is made incident on the liquid surface 7 in a mercury tank 12 on a horizontal table 11 whose horizontal surface is adjustable, and further its reflected light is converged on a semiconductor position detecting element 14 on the image forming surface of an image forming lens 13 through the surface 6 and mirror 4. Similarly, the reflected light of the reflected light from the (y)- axial reflection mirror 8 through the surface 7 is converged on the element 14, whose output is led to an electronic circuit (not shown in a figure) to calculate and display the (x) and (y) component of the tilt angle theta of the surface 7 on a display device (not shown in the figure) simultaneously. |
