| 摘要 |
PURPOSE:To measure the tension of a thin film by a method wherein the angle of inclination of the tangential line with the thin film is measured as the amount of inclination in the deformation thereof generated by applying an external force thereon at a non- contact state with a light leverage system to integrate the amount of inclination. CONSTITUTION:A laser light irradiated from a laser unit 4 is converted to a scanning light 5a turning with a scanner 6 and is incident on a lens 7 passing through a half mirror 8. Then, the scanning light 5a turns to a beam 5b parallelly moving with a lens 7 and enters a thin film 1. At this point, when the beam 5b crosses at the right angle to the thin film 1, it reflects passing through the same course as the incident course, gives the light point (b) as a reflected laser light 5c through the lens 7 and the mirror 8 to detect 9 the position of the light point. But when the thin film 1 is deformed by an external force, the beam 5b deforms turning to light 5c, which is detected 9 as light point (c) through the lens 7 and the mirror 8. The deviation between the light points (b) and (c) is observed as the amount of inclination continuously over the thin film 1 and the observed information is integrated to determined the difference in the height of the thin film 1 thereby enabling the measurement of the tension thereof without damaging the thin film. |
