| 摘要 |
PURPOSE:To attain magnification with high resolution by providing an illumination scanning mechanism which scans a sample in two dimensions with an extremely small spot, an optical magnification system which magnifies the sample, and an image pickup device which picks up an image of part of the magnified image corresponding to the illumination scanning point. CONSTITUTION:A laser light beam from a laser oscillator 1 is made incident on a deflector 2. The deflector 2 is made of an O-E and an O-A electrooptic crystal, which are applied with a driving voltage from a driving power source 8. An electric field is applied to the electrooptic crystals with the driving voltage to deflect the incident light beam by variation in refractive index with the electric field. Consequently, the beam incident on the deflector 2 from the laser 1 is deflected into an XY orthogonal bidirectional component, and the beam enters an Ftheta lens 3 to form a spot on a preparation 4 (sample surface). The image of the spot scanning the sample on the preparation 4 is magnified by the microscope and picked up by an image detector 6. |
