| 摘要 |
PURPOSE:To enable continuous detection of a shape with a non-contact type simple and small sensor by bringing a magnet close to the surface to be measured comprising a ferromagnetic substance to measure the displacement of the magnet when it is attracted in the direction of normal of the surface being measured. CONSTITUTION:A magnet 2 which is mounted on a support 3 is brought closer to a surface 11 to be measured. When the surface 11 being measured is made of only a ferromagnetic substance, a stress working on the discontinuous boundary plane between different magnetic materials has only the component vertical to the boundary plane and turns to the one smaller in the magnetic permeability from the one larger therein and hence, the magnet 2 is invariably attracted in the direction of normal of the surface 11 being measured. Then, by measuring the displacement of the magnet 2 with a displacement measuring device 4 employing a 3-component gauge or the like, the distance from and inclination of a curved surface are detected simultaneously with only one fine sensor structure. This enables the detection of the normal direction of the curved surface of the ferromagnetic substance, simultaneous detection of the distance from and inclination of the curved surface, the measurement of direction of inclination of any surface, angular parts and corners and furthermore, the detection of the center and direction of a hole.
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