发明名称 METHOD FOR PRODUCING A PHASE DELAY ELEMENT AND PHASE DELAY ELEMENT OBTAINED THEREBY
摘要 <p>On a substrate (1) comprised of a lithium niobate single crystal, there is applied an oxygen-inert diffusion barrier, for example in the form of a platinum layer (2), wherein is etched the desired strip pattern structure (6). A titanium layer (7) is then applied, before heating in a diffusion oven in the presence of an oxygen atmosphere. Thus, the titanium diffuses along the strip pattern structure (6) in the substrate wherein it forms an optical channel (8) wherein the light may be retarded and this by the action of an electrical field. The titanium surface is oxidized by heating in the presence of oxygen. The platinum strips (10, 11) remaining along the optical channel (8) form self-adjusting contacts for applying the control voltage.</p>
申请公布号 WO1985004021(A1) 申请公布日期 1985.09.12
申请号 EP1985000072 申请日期 1985.02.28
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