| 摘要 |
<p>PURPOSE:To reduce processes and to stabilize characteristics by coating a nonlinear element continuously and then patterning it by laser work. CONSTITUTION:A glass substrate 51 is coated continuously with a metallic film or indium tin oxide film 55 as the 1st layer, an insulating film 53 as the 2nd layer, and a metallic film 52 as the 3rd layer under the same vacuum by a sputtering method. Then, those three layers are etched in the same pattern by photoetching, and further another photoetching processing is carried out repeatedly to work the 3rd-layer metallic film into a lead electrode. At this time, picture-element electrodes of the 1st layer are connected in a line, so they are disconnected by laser light, preferably, YAG laser light from the reverse surface of the substrate and thus separated into individual picture-element electrodes. In this case, a laser trimming device is used to prevent other films from being cut.</p> |
