| 摘要 |
PURPOSE:To detect two-element distribution of three components of force precisely by arranging pressure-sensing modules, which can be detected while force applied to a pressure-receiving surface is decomposed into components of force in the three mutually orthogonal directions, on a substrate in an array manner with high density and forming the modules. CONSTITUTION:A components Fz of force vertical to a pressure-receiving surface 35 is detected by four strain gages 27-1-27-4 formed near an outer edge and an inner edge on the left and right sides on a line A-A' parallel with the pressure-receiving surface 35, and one component Fx of force vertical to the pressure-receiving surface 35 is detected by four strain gages 27-5-27-8 formed near an outer edge on two lines inclining at an angle of alpha deg. in the left and right directions of a line B-B' rectangular to the line A-A'. The other component Fy of force parallel with the pressure-receiving surface 35 is detected by four strain gages 27-9-27-12 formed at positions on a central axis in the strength of materials in the vicinity of a ring center on the two lines inclining at the angle alpha deg.. When the strain gages 27 are shaped through a semiconductor process, a pressure-sensing module 21 can be miniaturized extremely, and the two-element distribution of the magnitude of three components of force Fx, Fy and Fz can be detected precisely. |
