| 摘要 |
PURPOSE:To stably keep good characteristics of liquid droplets formation for long periods of time as well as increase the durability of a liquid jet recording head by providing the second protective layer continuously in a banded form on the adjacent heat generating portion in the liquid jet recording head in which the first and second protective layers are provided on the heating resistor layer. CONSTITUTION:The first protective layer 111 is made of an inorganic oxide, e.g., SiO2, etc., or an inorganic nitride, e.g., Si3N4, etc., as inorganic insulators, and the second protective layer 112 is preferably made of a metal material, e.g., Ta, etc., having bonding and tacking properties for the first protective layer and a comparatively excellent mechanical strength. The second protective layer 112 of the liquid jet recording head is provided continuously in a bar form on the adjacent heat generating portion, thereby making patterning easier. Since, even when nozzles are set at higher densities, the processing is not complicated and the needs for higher accuracy are eliminated, while high-quality, high-density liquid jet recording heads can be obtained at high manufacturing yields. |
