| 摘要 |
PURPOSE:To improve electroacoustic conversion efficiency by forming a zinc oxide thin-film on an amorphous substrate coated with a gold electrode in not less than 1,000Angstrom film thickness. CONSTITUTION:Both end surfaces of a quartz glass rod 1 are ground optically, and extremely thin chromium Cr and gold Au in film thickness of 100-2,000Angstrom are evaporated on one end surface. A zinc oxide thin-film 3 in film thickness of approximately 3mum is formed on the electrode 2 through high-frequency magnetron sputtering. A substrate temperature of 220 deg.C and the gas pressure of argon-oxygen (50%-50%) introducing gas of 3Pa are used as all of the conditions of sputtering. Since the zinc oxide thin-film formed on the Au electrode in comparatively thick film thickness has excellent crystallizability and distribution of light on a C axis, an electric mechanical coupling coefficient is increased, thus obtaining a high performance element. |
