| 摘要 |
PURPOSE:To obtain a composite substrate which has excellent properties in high frequency range in an actual range of a thin film head with a material having excellent wear resistance and precise workability by forming a nonconductive insulating protective film on the substrate of a nonmagnetic material having nonstrain layer surface including the specific value or lower of surface roughness and coating a thin magnetic material film on the protective film. CONSTITUTION:The surface of a nonmagnetic material having excellent wear resistance and precise workability such as Al2O3 or SiC ceramic materials of Al2O3-Fe2O3-TiC is processed with no strain as the precise flat surface having 100Angstrom or less of surface roughness. An insulating protective film having 30mum or less of thickness of Al2O3, SiO2 having excellent mechanical strength and hardness with nonconductivity is coated on the surface of the nonmagnetic material, and a thin magnetic material film of permalloy or Sendust having 10mum or less of thickness is coated on the protective film. As a method of forming the protective film and the magnetic material thin film employs a vacuum depositing process, a CVD process, or a sputtering process.
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