| 摘要 |
PURPOSE:To manufacture an optical waveguide having a tapered depth, by dipping a glass substrate having an electrode on one side and a mask pattern formed on the other side from the end thereof into a molten salt, and moving the substrate in the axial direction to carry out ion exchange. CONSTITUTION:A glass substrate 1 having an electrode 2 all over one surface and a mask pattern 3 formed on the other side to give an unmasked part in a wedge form is placed on a rotating stage 5 having a metal plate 7 for a megative electrode, and a voltage for making a molten salt 9 in a crucible 8 positive and the electrode 2 negative is applied thereto. The stage 5 is then rotated in the direction of arrow through a rotation angle controller 6, and the side having the mask pattern 3 formed thereon is dipped from the end part (1a) of the substrate 1 into the molten salt 9 and moved to extend the side to be dipped in the molten salt 9 in the axial direction with the lapse of time and carry out the glass ion exchange. Thus, a high-refractive index part 10 changing the depth with the distance in the direction for optical waveguide formation from the end (1a) is formed. |
