| 摘要 |
PURPOSE:To heat gss up to set temperature in a short time and improve the precision of angle detection by heating gas which surrounds a temperature sensing element directly by a heater plate. CONSTITUTION:A heater wire 25 is arranged on the outer circumferential surface of a casing 1, and the heater plate 30 is arranged in the casing 1, for example, on the inner surface of a dust plate 11 arranged in front of a nozzle 8. The gas injected from the nozzle 8 contacts the hater plate 30 directly and is therefore heated up to the set temperature in a short time. The heated gas circulates in the casing 1. |
