| 摘要 |
PURPOSE:To improve efficiency and precision by calculating the variation distance between photodetection positions on reference surfaces and actual measurement surfaces of an inclination measurement part and a displacement measuring part, and calculating the inclination and displacement extents of the measurement surfaces to the reference surfaces. CONSTITUTION:Laser light 10 is reflected by a measurement surface 22 to obtain regularly reflected laser light 13 and diffuse reflected laser light 14. the regularly reflected laser light 13 is photodetected at a position SA on an image sensor 12 through a translucent mirror 11. Then, the measurement surface 22 moves in parallel by a displacement extent (d) and also slants by an angle theta as shown by a measurement surface 22', the light is relfected at a position P1. In this case, the regularly reflected laser light 13 is changed in direction at a position H1 of the translucent mirror 11 and photodetected at a position SA1 on the image sensor 12. The diffuse reflected laser light 14, on the other hand, is so converged that a real image of a beam spot position P is formed as a real image of a position SP on an image sensor 16 through an optical system 15. Then, the beam spot position P1 is image-formed at a position SP1 on the image sensor 16. |
