| 摘要 |
PURPOSE:To purify the surface of a sample sufficiently without heating by converging the light of far ultraviolet rays in a vacuum wherein said rays aren't attenuated to obtain high energy and decomposing oxygen in the atmosphere with said energy to generate activated oxygen and irrdiating it as well directly on the surface of said sample. CONSTITUTION:A light source 1 for far ultraviolet rays such as a low pressure mercury lamp and a means 6 for converging the light of said rays are arranged in the inside of a vacuum vessel 4 and the light of far ultraviolet rays converged in the vessel 4 is made to irradiate a sample 2. Namely, since the light of said rays having 184.9nm and 253.7nm wavelength is converted to high energy in the vacuum and the high energy is irradiated on the surface of said sample such as a glass substrate, a photomask and a wafer, the chains of organic high polymer attached on the surface of said sample are cut to convert to a low molecular compound and the oxygen in the atmosphere is decomposed to generate ozone and atomic oxygen of activated oxygen and therefore an excellent effect in that the organic dust on the surface of said sample is burnt to ashes is obtained, and also said sample can be purified without extra heating. |
