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发明名称
CROSSED-FIELD VELOCITY FILTER AND ION-BEAM PROCESSING SYSTEM
摘要
申请公布号
EP0097535(A3)
申请公布日期
1985.07.24
申请号
EP19830303594
申请日期
1983.06.22
申请人
FUJITSU LIMITED
发明人
ITAKURA, TORU
分类号
H01L21/265;H01J37/05;H01J37/153;H01J49/46;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01J49/46
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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