摘要 |
PURPOSE:To obtain a compound membrane having superior separating capacity for gas, superior permeability for gas and extremely high durability by forming thin polymer films in three layers on a porous substrate. CONSTITUTION:A first thin film 2 comprising a polymer having high permeability for gas, a second thin film 3 comprising a polymer having high gas separating capacity, and a third thin film 4 comprising a polymer having superior gas permeability are formed on a porous substrate 1 to obtain a three layered polymer film structure. The first and the third thin film may be formed of a same polymer, pref. oxygen permeable polyorganosiloxane; preferred film thickness is 0.2-1mum. The second thin film is formed of polyphenylene oxide, polyolefine, polyacetylene, etc. These polymers have superior gas separating capacity. |