| 摘要 |
PURPOSE:To form efficiently a groove, etc. on the surface to be worked with one unit of laser oscillator by splitting a beam of laser light to plural beams, controlling the quantity of the split light by a shutter means and irradiating the light to the surface to be worked at prescribed intervals. CONSTITUTION:The laser light from a laser iscollator 1 is split to plural beams of laser light 20-20'' in a splitter 4 via a collimater 2 and a mirror 3. The split light 20-20'' are made incident to an irradiating part 22 constituted into an array via a half mirror 5 and are irradiated to a surface 11 to be worked via a shutter part 21 and a condenser lens 7 thus forming groove or worked parts. On the other hand, the light from a light source 14 is irradiated to the surface 11 via half mirrors 15, 5, a mirror 6, a shutter 21 and the lens 7 and the light reflected therefrom arrives at a CCD camera 16 through the same optical path. The positional information thereof is inputted to a microcomputer 17 which compares said information with the input information of a memory 18 and operates the part 22 via an X-Y constrol system 9 by the quantity thereof, thereby controlling the position and operating speed of the irradiating part 22 and controlling the opening and shutting of the shutter 21. |
