| 摘要 |
PURPOSE:To form a conductor coil having good adhesion at a low cost and to enable formation of a fine pattern in the stage of forming the conductor coil by using a metallic film consisting of a specific alloy as an underlying film for electroplating. CONSTITUTION:A metallic film consisting of nickel, iron or the alloy thereof is used as an underlying film 1A for conduction of electricity for the purpose of electroplating in the stage of forming a conductor coil 3. The material has excellent chemical resistance to a plating liquid. The metallic film which consists of nickel, iron or the alloy thereof and is not attacked by electroplating liquid for the conductor coil is used as the underlying film for electroplating in the stage of forming the conductor coil in the above-mentioned way and therefore the process for producting a thin film magnetic head which forms the conductor coil having excellent adhesion at a low cost and permits formation of a fine pattern is realized. |
