| 摘要 |
PURPOSE:To enable to obtain a large inductance value with a small area by a method wherein a plurality of conductive fine strips are provided almost in parallel on one of plural layers, and said conductive fine strips are connected to other conductive wirings in such a manner that the current runs in the same direction. CONSTITUTION:A helical coil, having a magnetic core 4 in the center,is formed using the wiring pattern 1 formed on the first layer of conductor, the wiring pattern 2 formed on the third layer of conductive layer, the aperture 3 on the interlayer insulating film to be used to connect the first layer wiring 1 and the third layer wiring 2, and the magnetic core 4 of high permeability formed on the second layer. Accordingly, if a current runs in the direction of I, a magnetic flux is generated in the direction of phi, and as said magnetic flux phi is generated in the direction in parallel with magnetic core 4, the magnetic flux phican be enhanced by using the material having a high permeability for the magnetic core, thereby enabling to form the coil having a high self-inductance. |
