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发明名称
摘要
申请公布号
JPS6026662(B2)
申请公布日期
1985.06.25
申请号
JP19760058916
申请日期
1976.05.21
申请人
SHINKAWA KK
发明人
HASEGAWA TAKESHI;CHOKAI KYOSHI
分类号
B23Q17/24;B23K20/00;G01B11/26;H01L21/60;H01L21/607
主分类号
B23Q17/24
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代理人
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