| 摘要 |
PURPOSE:To obtain a photosensitive compsn. for dry development having good practicality by imparting photosensitive characteristic to a polymer by incorporating a specific aromatic azide compd. to the polymer. CONSTITUTION:The polymer to be used as a component should be one which is easily removable by converting to ash in plasma gas. It is also necessary that the polymer shows no tackiness when it is formed to film. Suitable aromatic azide compd. is one expressed by the formula I (wherein R1 is H, 1-3C alkyl, cyano, phenyl, phenoxy; R'1 is 1-3C alkyl, cyano, phenyl, phenoxy; R2 is 2-3C alkyl, cyano, phenyl, phenoxy; R3 is H, 1-3C alkyl, cyano, phenyl, phenoxy), independently of each other, and one expressed by the formula II. |
