发明名称 |
Specimen supporting device |
摘要 |
A specimen support comprises a pair of specimen attracting portions each having an electrode on the lower side thereof through an electrically insulating member. The pair of specimen attracting portions is arranged in opposed relation to one side of the specimen to be attracted thereto and is made of semiconductive dielectric material. A voltage is applied between the pair of specimen attracting portions thereby to attract the specimen to the portions electrostatically.
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申请公布号 |
US4520421(A) |
申请公布日期 |
1985.05.28 |
申请号 |
US19830521610 |
申请日期 |
1983.08.09 |
申请人 |
HITACHI, LTD. |
发明人 |
SAKITANI, YOSHIO;MINAMIKAWA, YOSHIHISA |
分类号 |
H01J37/317;H01L21/265;H01L21/683;H02N13/00;(IPC1-7):H01T20/00 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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