| 摘要 |
PURPOSE:To form a liquid crystal orienting film which has a uniform film thickness and exhibits uniform liquid crystal orientability by evaporating the raw material monomer of polyimide in a vacuum, forming the film of a polyamic acid on an electrode surface, exposing the film surface to glow discharge and polymerizing the same to polyimide. CONSTITUTION:Plural sheets of the electrode substrates 1 are contained into a charging chamber 2 and are transferred by each sheet into a vapor deposition chamber 4 where the uniform polyamic acid film 3 is formed to a prescribed thickness on the electrode side surface. The substrates are successively transferred into a discharge treatment chamber 5. Gaseous argon is introduced into the chamber and a DC power source is impressed to electrodes 17, 17 to generate the glow discharge. The surface of the polyamic acid film 3 is exposed to the positive column region thereof. The substrates are then contained successively into a heating chamber 6 where the substrates are heated by a heater 21 to induce the polymn. reaction of polyimide and to form a polyimide film 24 on the electrode side surface of each substrate 1. The substrates are taken out of the heating chamber 6. |
