| 摘要 |
PURPOSE:To enhance the bonding strength between a detection element and a support substrate, by preliminarily securing a particle group to the element forming surface of a substrate to provide uneveness and forming a thick film type detection element thereon. CONSTITUTION:An insulating ceramic powder and an org. binder are mixed in an org. solvent and the resulting mixture is formed into a sheet form to be used as a support substrate 1. An electrode pattern having a desired shaped is formed to the surface of thus obtained sheet by thick film printing using a metal paste. On the other hand, secondary particles having an average particle size of 5- 500mum are granulated from a ceramic powder to be formed into particle groups 4,...,4 and dispersed in the vicinity of the electrode pattern on the surfasce of the sheet and, after baking, a paste comprising gas responsive metal oxide is printed thereon in a thick film form and baked. Because the gas sensor constituted as mentioned above has a detection element provided on the large uneven layer comprising the particle groups 4,...,4 the bonding strength with the substrate is high and the peel-off of the detection element from the substrate can be extremely reduced. |
