| 摘要 |
PURPOSE:To make the check of airtightness of a material to be checked accurate, by forming a mounting table of the material to be checked with an elastic member having hardness of 10 deg.-30 deg.. CONSTITUTION:A material to be checked 5 is mounted on a mounting table 11. A through hole 12 is provided in the mounting table 11 so that the hole is communicated to a suction pipe 3. The inside of the pipe 3 is made vacuum and the checking is performed. At this time, the table 11 is formed by an elastic member such as natural rubber, whose hardness is 10 deg.-30 deg. in the hardness measuring method specified by JIS-K6301. When the pipe 3 is made vacuum, a lower part 5a of the material to be checked 5 is buried to the inner part of the table 11 by the own weight of the material 5 and the pressure difference between the inside and the outside. Thus the gap between the material to be checked 5 and the table 11 can be eliminated. |
