| 摘要 |
PURPOSE:To make a device small-sized, and to reduce its cost by inserting and providing a controlling solenoid valve in a pipe, comparing and calculating a detecting value of a flow rate (pressure) transmitting device by a control unit, and driving said valve. CONSTITUTION:A controlling solenoid valve 13 is inserted into a duct 14 of the downstream side through a pressure source 12 from a process pipe 11. Also, an output of a flow rate transmitting device 15 installed in said duct 14 is transmitted to a control unit 16, and compared with a set value. A deviation is derived by said comparison, and said controlling solenoid valve 13 is driven. In this way, an output signal corresponding to said deviation is applied to the solenoid valve 13, a flow rate is controlled, and a constant flow rate is obtained. |
