Protection of semiconductor wire bonding capillary from spark erosion

摘要

A wire bonding capillary of a hard, normally electrically non-conductive material wherein surfaces of the capillary are coated with a thin electrically conductive material for protecting the capillary bonding face from spark erosion damage and reduction in carbon-like material build-up inside the inner taper of the capillary bore by conduction of current from an electronic flame-off (EFO) torch through a low resistance path to ground.