| 摘要 |
PURPOSE:To improve the efficiency of a gas laser device to inputted power and to contrive to miniaturize the device by a method wherein a high-pressure DC power source and a high-pressure DC leakage power source are mutually connected in series on the anode sides of the laser tubes and when the current value rose to more than a fixed one, the high-pressure power source voltage is made to drop. CONSTITUTION:A high-pressure DC power source 1 and a high-pressure DC leakage power source 10 are mutually connected in series on the anode sides 4 of laser tubes 3. The power source 1 generates voltage V3 and the power source 10 generates voltages V2-V3. At the starting time of discharge, the discharge voltage comes to voltage V2 and the discharge is sustained by the power source 1 only in case of more than discharge current A, whose discharge is stable. As a result, the power source characteristics are approached the discharge characteristics, thereby enabling to enhance the efficiency of the titled device to inputted power. |
