| 摘要 |
PURPOSE:To obtain a moisture sensitive element which has good sensitivity and responsiveness, is manufacturable with an easy process and is inexpensive by laminating and providing a temp. detecting element, electrode for heating and lithium chloride layer on one main surface of an electrical insulating base plate. CONSTITUTION:Platinum paste is printed on one main surface of an electrical insulating base plate 1 consisting of alumina and is calcined to form a temp. detecting element 2. A protective insulating layer 3 consisting of a glass layer is coated thereon and an electrode 4 for heating consisting of a pair of comb- shaped gold electrodes is formed thereon by vacuum deposition or sputtering. A lithium chloride layer 5 is then coated thereon by dipping. The temp. of the lithium chloride layer balanced with the atmosphere temp. is exactly detected with good sensitivity and responsiveness. |
