| 摘要 |
PURPOSE:To produce a stable laser device with long life assured eliminating any reaction of nitrogen gas to electrode discharging surface by a method wherein, in an nitrogen laser device utilizing main discharging electrodes, the main discharging electrodes are made of Ti or Ti alloy material. CONSTITUTION:Main discharge electrodes 11 and 12 confronting to each other are provided in an outer case 7 and a high impedance element 5 is connected to the ends of these electrodes 11 and 12 in parallel while one end of them is likewise connected to a DC high voltage power supply outside the outer case 7 through the intermediary of another high impedance element 6. On the other hand, the outer surfaces of the electrodes 11 and 12 are connected to both grounded capacitors 2 and 3 and the capacitor 2 is further connected to a starting trigger electrode 9 outside the outer case 7 through the intermediary of a starting discharge tube 4. In such a constitution, the main discharge electrodes 11 and 12 are respectively fixed to the capacitors 2 and 3 comprising metallic films provided on both sides of a ceramic substrate. At this time, the main discharge electrodes 11 and 12 may be made of Ti or Ti alloy to avoid any reaction due to glow discharge of nitrogen gas preventing any damage on discharge surface from happening. |
