| 摘要 |
<p>PURPOSE:To enable effective blowing action by forming a large width section and a small width section to a laser blowing link and preventing the diffusion of the heat of absorption due to the projection of laser beams. CONSTITUTION:The interfaces 6 with PSG films are also formed to each short- side direction of a central section 5 in a laser blowing link 1 by forming the width of the central section 5 in the long-side direction of the laser blowing link 1 in size larger than the width of other section on both sides of the central section 5. Consequently, since a diffusion in the long-side direction of the link of the energy of laser beams abosrbed by the central section 5 in which the width of the link 1 is enlarged is prevented by the interfaces 6, the temperature of only said central section 5 is elevated partially more than other sections, only the central section is easy to be blown extremely, and the width of the link 1 is winded in the central section 5 at the same time. Accordingly, the displacement of the projection of laser beams to the central section 5, particulary, the tolerance of displacement in the short-side diretion-that is, a margin regarding accuracy on the position of projection can be increased.</p> |
