| 摘要 |
PURPOSE:To improve accuracy of measurement of infrared spectroscopic measurement, by fitting lens means in a light-trasmission window mounted in a pair of parallel side-walls and installing a heat sump in the light-collecting position located between both lens means to accommodate a pecimen holder. CONSTITUTION:Infrared rays re collected through a light inlet window 2 consisting of a lens fit into a side-wall 1 of a cryostat 10 and a focus is built on a specimen 5, such as of silicone chip, etc. The speciment 5 is held at low temperature at approx. 77 deg.K or less by a heat sump 6 and the infrared rays, after passing through the specimen 5, are collected by a light outlet window 3 consisting of a lens and absorbed in a detector 7. By this arrangement, effective convergence of the infrared rays can be realized and further, incidence into the specimen can be attained without any discontinuities and concentrations of impurities, etc. included in a semiconductor crystal can be measured with high precision. |
