Apparatus for stably anchoring layers on large-area semiconductor components

摘要

The application relates to an apparatus for anchoring layers on large-area semiconductor components, in particular solar cells, in which the contact array is applied with the aid of screen-printing technology and an electrically conducting paste and is dried in a subsequent heating process. In order to increase the cost effectiveness of such apparatuses, use is made of a paternoster (bucket-elevator) or continuous furnace (4) whose individual treatment zones (I-III), which are at different temperatures and contain different gas atmospheres, are separated from one another and connected to different gas supply and gas extraction systems. A multiplicity of the components to be treated are arranged one on top of the other in magazines (16) which pass through the furnace in close succession on a conveyor device (1). <IMAGE>