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发明名称
APPARATUS FOR TREATING PLATELIKE ARTICLE
摘要
申请公布号
JPS6036676(A)
申请公布日期
1985.02.25
申请号
JP19830241971
申请日期
1983.12.23
申请人
HITACHI SEISAKUSHO KK
发明人
KAMAIKE RIYOUSAKU
分类号
C23F1/08;H01L21/306
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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