| 摘要 |
<p>PURPOSE:To prepare clean gas suited to a preparation chamber of semiconductor, etc. by filtering completely dust, etc. generated by the operation of pressure switch by a filter provided between the pressure switch and an ejecting port of the clean gas. CONSTITUTION:An end of a gas feeding pipe 1 is connected to the high-pressure gas source side 2, and the gas acts to operate a pressure switch 4 which is operated by the fluid pressure of the gas through a valve and a regulator, etc. In this case, a floating piece (which is not illustrated in the figure) slides on the inside face of a cylinder of the switch, and dust is generated by the sliding movement of a short-circuiting terminal piece between terminal pieces provided parallelly. A filter 7 is provided between the pressure switch 4 and an ejecting port 6 of the clean gas in order to remove the dust. Further, an ionizing section of the gas 8 is provided between the filter 7 and the ejecting port 6 of the clean gas. By this constitution, conditions in a semiconductor preparation chamber is held satisfactorily clear from dust.</p> |
